Business Partners

Hermes-Epitek delivers optimized product packages for semiconductor manufacturing equipment, integrates equipment from different vendors to not only achieve optimum equipment performance for clients but also secure the highest market acceptance of related equipment suppliers.

The total number of equipment installed

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The Sustaining Force Behind Success Stories

Since the founding of Hermes-Epitek over 40 years ago, we have achieved multiple industry records:

We have participated in many of the construction of silicon wafer manufacturing plants in Taiwan and Southeast Asia; in the past decade, we have also participated in the establishment of factories founded in China.

22,000 semiconductor and opto-electronic equipment installed

1,200 members worldwide service team

200 semiconductor and opto-electronic plants served

40 years of professional services

24 hours non-stop, year-round technical support

20 worldwide business locations

Advanced Ion Beam Technology, Inc. (Taiwan)

  • Ion Implantation: Ion Implanter (A Hermes-Epitek subsidiary company)

Sumitomo Heavy Industries Material Solutions Co., Ltd.

  • Ion Implantation: Ion Implanters and Plasma Doping

Hermes Testing Solutions Inc.

Testing Solutions

Benchmark Technologies (United States)

  • Lithography: Reticles/Masks; Focus Analysis tool; Software

Mycronic AB (Sweden)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

TC TECH Sweden AB (Sweden)

A patented unique system for the production of light guide plates

  • TCP 1000 HT/HP; 150 HPE; 100 HP
  • TCP EE, Edge Embossing

Taiwan Electron Microscope Instrument Corporation (Taiwan)

Desktop Scanning Electron Microscope & Liquid-Phase Inspection Modules

  • Desktop SEM & Liquid-Phase Inspection Modules
  • BEI + STEM analysis
  • Energy dispersive X-ray spectrometer (EDS) for elemental analysis
  • Software for 3D view and surface roughness measurement functions

Fujikin Incorporated (Japan)

  • Parts: FCS ( Flow Control System ), IGS (Integrated Gas System )

ASMPT

ASM Pacific Technology Limited (ASMPT) is a leading integrated solutions provider in Semiconductor and Electronics industries. We have three business segments – Back-end Equipment, Materials, and NEXX Products….

ORC (Japan)

  • Stepper : Bump, Cu Post, RDL, TSV
  • lamp : UV lamp

V5 Technologies

Leading Company of AI and Image Processing Technologies

  • Automated OM
  • AI ADC
  • 2D AOI (Automated Optical inspection)

Comet Yxlon

  • 2D/3D X-ray Inspection

Tricorn (Taiwan)

  • VOC / AMC detector in manufacturing environment with sub-ppb level of capability.

Tokyo Electron Device

RAYSENS is a macro inspection system that can detect defects on wafers with high speed and high sensitivity using optical technology that captures slight changes in light.

  • Wafer inspection system

OAI(US)

Optical Associates Inc.

OAI is a Silicon Valley-based manufacturer of advanced precision equipment for the Solar, Photovoltaic, Semiconductor, MEMS, and Microfluidics Industries.

  • Mask Aligner
  • UV meter & Probes

Cowin DST CO, LTD. (Korea)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Nearfield Instruments (the Netherlands)

Nearfield Instruments develops and delivers revolutionary metrology and inspection solutions for the advanced semiconductor manufacturing industry.

Automated unrivalled high-throughput 3D scanning probe microscopes for process development
and control of:

  • CMP: Hybrid bonding, flatness & roughness
  • (High NA) EUV lithography: photoresist metrology and defectivity
  • High aspect ratio structures for deep and narrow trenches and holes
  • Subsurface overlay/ defectivity

YESIANG Enterprise Co., Ltd.

  • AMC Chemical Filter
  • HEPA / ULPA

HYE Technology

  • Ÿ In-Situ Macro

  • Ÿ Inspection System

E&R

In-Line Raman provides non-destructive metrology solutionfor Epi and thin film process

  • Epi/Thin film strain and stress
  • Epi/Thin film dopant concentration
  • Customizable for different structure and different size wafer

Fashion Semicon Technology Co., Ltd

Auto laser de-bonder Equipment for temporary bonding process.

  • Laser de-bonder
  • Clean module
  • Clean chemical (release film, glue)
  • Temporary bonding material
  • De-tape module

JTEKT CORPORATION (Japan)

JTEKT CORPORATION (Japan)

Oven/furnace tool

  • Oven/furnace tool

NanoClean Materials Co., Ltd.

JTEKT CORPORATION (Japan)

anoClean Materials Co., Ltd. is committed to advancing valve cleaning technology and applying innovative materials. Our new fluid design incorporates a range of core technologies and patents, both domestic and international, and is ideal for high-purity chemicals, organic solvents, and pure water. All of our products undergo rigorous verification procedures and testing specifications to ensure their reliability and durability.

  • Oven/furnace tool

Advanced Ion Beam Technology, Inc. (Taiwan)

  • Ion Implantation: Ion Implanter (A Hermes-Epitek subsidiary company)

Sumitomo Heavy Industries Material Solutions Co., Ltd.

  • Ion Implantation: Ion Implanters and Plasma Doping

Hermes Testing Solutions Inc.

Testing Solutions

Benchmark Technologies (United States)

  • Lithography: Reticles/Masks; Focus Analysis tool; Software

Mycronic AB (Sweden)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

TC TECH Sweden AB (Sweden)

A patented unique system for the production of light guide plates

  • TCP 1000 HT/HP; 150 HPE; 100 HP
  • TCP EE, Edge Embossing

Taiwan Electron Microscope Instrument Corporation (Taiwan)

Desktop Scanning Electron Microscope & Liquid-Phase Inspection Modules

  • Desktop SEM & Liquid-Phase Inspection Modules
  • BEI + STEM analysis
  • Energy dispersive X-ray spectrometer (EDS) for elemental analysis
  • Software for 3D view and surface roughness measurement functions

Fujikin Incorporated (Japan)

  • Parts: FCS ( Flow Control System ), IGS (Integrated Gas System )

ASMPT

ASM Pacific Technology Limited (ASMPT) is a leading integrated solutions provider in Semiconductor and Electronics industries. We have three business segments – Back-end Equipment, Materials, and NEXX Products….

ORC (Japan)

  • Stepper : Bump, Cu Post, RDL, TSV
  • lamp : UV lamp

V5 Technologies

Leading Company of AI and Image Processing Technologies

  • Automated OM
  • AI ADC
  • 2D AOI (Automated Optical inspection)

Comet Yxlon

  • 2D/3D X-ray Inspection

Tricorn (Taiwan)

  • VOC / AMC detector in manufacturing environment with sub-ppb level of capability.

Tokyo Electron Device

RAYSENS is a macro inspection system that can detect defects on wafers with high speed and high sensitivity using optical technology that captures slight changes in light.

  • Wafer inspection system

OAI(US)

Optical Associates Inc.

OAI is a Silicon Valley-based manufacturer of advanced precision equipment for the Solar, Photovoltaic, Semiconductor, MEMS, and Microfluidics Industries.

  • Mask Aligner
  • UV meter & Probes

Cowin DST CO, LTD. (Korea)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Nearfield Instruments (the Netherlands)

Nearfield Instruments develops and delivers revolutionary metrology and inspection solutions for the advanced semiconductor manufacturing industry.

Automated unrivalled high-throughput 3D scanning probe microscopes for process development
and control of:

  • CMP: Hybrid bonding, flatness & roughness
  • (High NA) EUV lithography: photoresist metrology and defectivity
  • High aspect ratio structures for deep and narrow trenches and holes
  • Subsurface overlay/ defectivity

YESIANG Enterprise Co., Ltd.

  • AMC Chemical Filter
  • HEPA / ULPA

HYE Technology

  • Ÿ In-Situ Macro

  • Ÿ Inspection System

E&R

In-Line Raman provides non-destructive metrology solutionfor Epi and thin film process

  • Epi/Thin film strain and stress
  • Epi/Thin film dopant concentration
  • Customizable for different structure and different size wafer