光罩制作 (Mask Manufacturing)

光罩制作 (Mask Manufacturing)
经由雷射/电子束描绘机将线路图描绘在石英/玻璃基板上,此基板(光罩),会借曝光机投影成像技术,将其线路图成像到晶圆或玻璃基板上。

Product

Mycronic AB (瑞典)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

Mycronic AB (瑞典)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

光罩修补(Photo Mask Repair)
雷射气相沉积(Laser CVD):
利用特殊雷射CVD成膜之技术,使用雷射将羰基金属化合物-Cr(CO)6高温分解(光解作用),使Cr附着于光罩上,进而将不良线路修补连接。

Product

Cowin DST CO, LTD. (韩国)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

黄光微影涂布及显影 (Photo-Lithography)

光阻涂布:去水烘烤、HMDS涂布、光阻涂布、软烤。
曝光:以曝光机搭配光罩使用。
显影:曝后烤、显影、硬烤。

干式蚀刻 (Dry Etch)

利用气体作为反应物,以低压和高能的环境产生电浆,去除玻璃基板表面的薄膜,定义出图形。

测试修补 (Laser Repair)

黑色阻(Black Matrix)覆盖遮光
利用特殊雷射将滤光片上之黑色色阻融化并覆盖于漏光之画素上, 以达到遮蔽之结果

色阻碳化(Direct Method)遮光
利用特殊雷射将滤光片上漏光画素之R/G/B色阻碳化,以达到遮蔽之结果

雷射气相沉积(Laser CVD)
利用特殊雷射CVD成膜之技术,使用雷射将羰基金属化合物-W(CO)6高温分解(光解作用),使W附着于面板上,进而将断开之不良斜配线路修补连接

Product

Cowin DST CO, LTD. (韩国)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Cowin DST CO, LTD. (韩国)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Cowin DST CO, LTD. (韩国)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

喷墨式印刷 (Inkjet Printing)

喷涂R/G/B 有机发光材料,及其对应之传导层底材在玻璃基板上,型成OLED 发光像素图型。

导光板制作 (LGP Manufacturing)

导光板(Light Guide Plate)是背光模组零组件中的关键元件。利用全反射的原理将光源光线传至导光板的远端,再利用导光板的底面扩散点,往各个角度扩散,可提高面板光辉度及控制亮度均匀。

Product

TC TECH Sweden AB (瑞典)

A patented unique system for the production of light guide plates

  • TCP 1000 HT/HP; 150 HPE; 100 HP
  • TCP EE, Edge Embossing