High Resolution Wafer Inspection for Memory Fabs
Negevtech 3100
200mm/300mm
Negevtech 3100¡¦s patented technology platform is uniquely designed to address inspection applications across the entire memory mfg process.
Most robust sensitivity from FEOL to BEOL
Reduced COO and higher throughput in FEOL
Better control and yield in BEOL today and for shrinks
Highest sensitivity to unique and emerging defects in memory devices
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