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| Ion Implantation Tool |
| iStar |
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200mm/300mm |
| iStar is a batch type ion implanter capable for low energy implantation and high tilt angle implantation. Due to its novel ion source design and beam line design, iStar can produce high beam current in all its energy range. Also, iStar can guarantee high energy purity of the beam with its unique beam filtering function. iStar is a new generation of ion implanter, which meets your advanced process requirements such as up to +/-45 deg. high tilt implantation. |
- Energy RangeĄG100 - 80,000 eV
- Dopant SpeciesĄG11B, 49BF2, 31P, 75As, 115In, 122Sb and others
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