E-Beam Defect Inspection Tool
eScan 300
200mm/300mm
The eScan® 300, is the most advanced e-beam defect inspection tool available to the semiconductor industry.
Unparalleled design for both voltage contrast and critical physical defect detection
Largest Field of View of any e-beam inspection tool
LeapNscan
TM
technology optimizes whole die sampling and throughput
Ultra-low landing energy enables detection of VC defects competitive tools cannot – critical for 65nm and 45nm technologies
E-beam column optimized for production
Real time review and ADC provide fastest time to results
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