Hermes is able to combine different vendor equipment in a heterogeneous format enabling the maximum value for our customers¡¦ investment.
SEMICONDUCTOR
Thermal Process
Coat / Develop
Ion Implantation
Etching
Cleaning
CMP
E-Beam Inspection
Brightfield Imaging Tool with DF and BF Illuminations
Metrology
Yield Enhancement
Wafer Probe
FLAT PANEL DISPLAY
Coat / Develop
Etching / Ashing
Pattern Generator
Micronic - MP80+/MP185+
Micronic - LRS11000/LRS15000
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